Design of two-dimensional polarization-selective diffractive optical elements with form-birefringent microstructures

Mark S. Mirotznik; David M. Pustai; Dennis W. Prather; Joseph N. Mait

doi:10.1364/AO.43.005947

Applied Optics
Vol. 43,
Issue 32,
pp. 5947-5954
(2004)
•https://doi.org/10.1364/AO.43.005947

Design of two-dimensional polarization-selective diffractive optical elements with form-birefringent microstructures

Mark S. Mirotznik, David M. Pustai, Dennis W. Prather, and Joseph N. Mait

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Mark S. Mirotznik, David M. Pustai, Dennis W. Prather, and Joseph N. Mait, "Design of two-dimensional polarization-selective diffractive optical elements with form-birefringent microstructures," Appl. Opt. 43, 5947-5954 (2004)

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Abstract

We describe a design methodology for synthesizing polarization-sensitive diffractive optical elements based on two-dimensional form-birefringent microstructures. Our technique yields a single binary element capable of producing independent phase transformations for horizontally and vertically polarized illumination. We designed two elements for operation at 10.6 μm and fabricated them in silicon. Qualitative experimental results agree with design predictions.

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Grating Phase Pair	h (μm)	ff		Λ (μm)		ϕ (rad)		Δϕ (rad)
Grating Phase Pair	h (μm)	ff _x	ff _y	Λ_x	Λ_y	ϕ^x	ϕ^y	Δϕ (rad)
(0,π)
Desired	4.7	0.40	1.00	2.5	2.5	1.07	4.22	3.15
Fabricated	4.6	0.43	1.00	2.4	2.4	1.16	4.26	3.10
(0,0)
Desired	4.7	0.50	0.50	2.5	2.5	1.02	1.02	0.0
Fabricated	4.6	0.55	0.55	2.4	2.4	1.24	1.24	0.0

Diffraction Efficiency	Diffractive Order
	(0,0)		(-1,-1)		(-1,+1)		(+1,-1)		(+1,+1)
	y a	x b	y	x	y	x	y	x	y	x
Simulated	4.4	97.4	23.9	0.65	23.9	0.65	23.9	0.65	23.9	0.65
Measured	28.4	64.2	11.3	1.4	11.1	1.2	10.9	1.1	11.1	1.2

Diffraction Efficiency	Diffractive Order
	(0,0)		(-1,0)		(+1,0)		(0,-1)		(0,+1)
	y a	x b	y	x	y	x	y	x	y	x
Simulated	5.4	5.2	5.1	0.8	62.0	6.8	5.3	5.4	0.9	61.0
Measured	33.4	31.6	6.1	2.4	28.2	3.3	4.1	4.3	2.9	27.9

Grating Phase Pair	h (μm)	ff		Λ (μm)		ϕ (rad)		Δϕ (rad)
Grating Phase Pair	h (μm)	ff _x	ff _y	Λ_x	Λ_y	ϕ^x	ϕ^y	Δϕ (rad)
(0,π)
Desired	4.7	0.40	1.00	2.5	2.5	1.07	4.22	3.15
Fabricated	4.6	0.43	1.00	2.4	2.4	1.16	4.26	3.10
(0,0)
Desired	4.7	0.50	0.50	2.5	2.5	1.02	1.02	0.0
Fabricated	4.6	0.55	0.55	2.4	2.4	1.24	1.24	0.0

Diffraction Efficiency	Diffractive Order
	(0,0)		(-1,-1)		(-1,+1)		(+1,-1)		(+1,+1)
	y a	x b	y	x	y	x	y	x	y	x
Simulated	4.4	97.4	23.9	0.65	23.9	0.65	23.9	0.65	23.9	0.65
Measured	28.4	64.2	11.3	1.4	11.1	1.2	10.9	1.1	11.1	1.2

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Applied Optics