Abstract
We have investigated a process based on the dip method to fabricate a polymeric vertical microlens (PVM). After the primary dip step, the PVM is formed by hanging the liquid SU-8 on a wall in virtue of the strong adhesive force and liquid cohesion. The microlens is then baked and exposed in ultraviolet light to further cross-link the negative photoresist SU-8 to enhance thermal stability and reliability. According to the experimental results, the radius of curvature of the fabricated vertical microlens varies from 120.8 to , which relates to the dip depth or the thickness of the dipped pool. To characterize the PVM, an edge-emitting laser diode is then bonded onto the optical bench and a detector is utilized to observe the beam divergence with and without the lens insertion. Compared with an angle of 40.8° without the microlens, the beam passing through a suitable PVM shows a vertical far-field angle of 3.32°. Furthermore, the lens efficiency, approximately , is also specified by the measurements.
© 2006 Optical Society of America
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