Abstract

A new grating phase mask is designed that allows the cancellation of the zeroth transmitted order in a diffraction configuration where the grating period is smaller than twice the exposure wavelength. An analytical treatment based on the true-mode method delivers the structure parameters, achieving 100% interference contrast. This modal approach is used to describe the modal operation of the giant reflection to zero-order device.

© 2007 Optical Society of America

Zeroth-order phase-contrast technique

José Carlos Pizolato Jr., Giuseppe Antonio Cirino, Cristhiane Gonçalves, and Luiz Gonçalves Neto
Appl. Opt. 46(31) 7604-7613 (2007)

Parameter-tolerant binary gratings

Thomas Kämpfe and Olivier Parriaux
J. Opt. Soc. Am. A 27(12) 2660-2669 (2010)

100 nm period grating by high-index phase-mask immersion lithography

Yannick Bourgin, Yves Jourlin, Olivier Parriaux, Anne Talneau, Svetlen Tonchev, Colette Veillas, Petri Karvinen, Nicolas Passilly, Ahmad R. Md Zain, Richard M. De La Rue, Jürgen Van Erps, and David Troadec
Opt. Express 18(10) 10557-10566 (2010)

Investigation of the polarization-dependent diffraction of deep dielectric rectangular transmission gratings illuminated in Littrow mounting

Tina Clausnitzer, Thomas Kämpfe, Ernst-Bernhard Kley, Andreas Tünnermann, Alexandre Tishchenko, and Olivier Parriaux
Appl. Opt. 46(6) 819-826 (2007)

Polarization-selective beam splitter based on a highly efficient simple binary diffraction grating

Danaë Delbeke, Roel Baets, and Peter Muys
Appl. Opt. 43(33) 6157-6165 (2004)