Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Visually testing the dynamic character of a blazed-angle adjustable grating by digital holographic microscopy

Not Accessible

Your library or personal account may give you access

Abstract

We employed digital holographic microscopy to visually test microoptoelectromechanical systems (MOEMS). The sample is a blazed-angle adjustable grating. Considering the periodic structure of the sample, a local area unwrapping method based on a binary template was adopted to demodulate the fringes obtained by referring to a reference hologram. A series of holograms at different deformation states due to different drive voltages were captured to analyze the dynamic character of the MOEMS, and the uniformity of different microcantilever beams was also inspected. The results show this testing method is effective for a periodic structure.

© 2009 Optical Society of America

Full Article  |  PDF Article
More Like This
Vibration measurement of a miniature component by high-speed image-plane digital holographic microscopy

Yu Fu, Hongjian Shi, and Hong Miao
Appl. Opt. 48(11) 1990-1997 (2009)

Three-dimensional volumetric measurement of red blood cell motion using digital holographic microscopy

Yong-Seok Choi and Sang-Joon Lee
Appl. Opt. 48(16) 2983-2990 (2009)

Transmission digital holographic microscopy based on a beam-splitter cube interferometer

Weijuan Qu, Kallol Bhattacharya, Chee Oi Choo, Yingjie Yu, and Anand Asundi
Appl. Opt. 48(15) 2778-2783 (2009)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (8)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved