Abstract
Transmission resonant filters in a waveguide with vertical gratings have been realized in silicon on insulator wafers. Experimental studies of fabricated devices show a broad stopband of in the center of which exists a narrow transmission band of with a quality factor of . These resonant cavities are useful for laser cavities, switches, modulators, detectors, and tunable filters.
© 2007 Optical Society of America
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Equations (2)
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