Abstract

Image contrast enhancement, high lateral resolution, and height information are obtained with induced polarization evanescent imaging using a solid immersion lens. Experiments are conducted by imaging features on a patterned Si substrate. Imaging theory is used to predict optimum orientation of high-spatial-frequency samples, and a topographical image is derived from the induced polarization image through a calibration procedure. A numerical aperture of 1.5 is used in the experiment. Height accuracy of ± 2nm is demonstrated with a known sample.

© 2006 Optical Society of America

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History
Original Manuscript: July 19, 2006
Manuscript Accepted: October 5, 2006
Revised Manuscript: October 2, 2006
Published: December 23, 2006

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Author Affiliations

Tao Chen, Tom D. Milster, Seung-Hune Yang, Delbert Hansen

University of Arizona

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