Effects of object roughness on partially coherent image formation
Optics Letters, Vol. 25, Issue 7, pp. 454-456 doi:10.1364/OL.25.000454
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- OCIS Codes:
- (030.5770) Coherence and statistical optics : Roughness
- (110.4980) Imaging systems : Partial coherence in imaging
- (110.5220) Imaging systems : Photolithography
- (110.7440) Imaging systems : X-ray imaging
- (180.7460) Microscopy : X-ray microscopy
- (260.7200) Physical optics : Ultraviolet, extreme
Citation
Neil A. Beaudry and Tom D. Milster, "Effects of object roughness on partially coherent image formation," Opt. Lett. 25, 454-456 (2000)
http://www.opticsinfobase.org/abstract.cfm?URI=ol-25-7-454
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Phase perturbations in the object plane of a partially coherent imaging system are found to produce artifacts in the aerial image. It is demonstrated that phase perturbations of as little as λ/30 rms can produce visible deformation in the final image for modest coherence factors, such as σc = 0.4. A combination of simulation and experiment is used to demonstrate the effects. Application to line-edge roughness in lithography is described.
© 2000 Optical Society of America
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Author Affiliations
Optical Sciences Center, University of Arizona, Tucson, Arizona 85721
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