Abstract

Fluidic self-assembly can provide the vital step in the fabrication of chip-sized optical MEMS for a wide variety of applications. Nature herself provides an inspirational model for fluidic self-assembly, as well as useful guidelines for processes that can be employed to build microsystems. In this review article, we describe some achievements in assembly that have already been demonstrated, including our own research on fluidic self-assembly of micromirrors for an adaptive-optics array. The results reported to date lead us to predict significant growth in the applications to microsystems of fluidic self-assembly techniques.

© 2002 Optical Society of America

[Optical Society of America ]

» View Full Text: Acrobat PDF (589 KB)

References

Please [login to View References]

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Advanced Search

Recent ToC Categories (Beta)