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Design and Fabrication of Multichannel Tunable Photodetector Array

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Abstract

A long-wavelength multichannel tunable photodetector array was fabricated based on multistep Fabry-Pérot filter and thermal-optic effect. The array can detect multiple channels, and the tuning range of each detector is 10nm. A spectral linewidth of 0.5nm, a quantum efficiency over 27%, and a 3dB bandwidth of 9.2GHz were simultaneously obtained.

© 2009 OSA, IEEE Photonics Society, SPIE, COS, CIC

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