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Waveguide InGaAs MSM Photodetector for Chip-Scale Optical Interconnects on III-V CMOS Photonics Platform

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Abstract

InGaAs MSM photodetectors monolithically integrated with InP waveguides on SiO2/Si are demonstrated using III-V CMOS photonics platform. 20-μm-long InGaAs PD exhibits high responsivity of > 1.05 A/W and broadband operation, enabling chip-scale WDM optical interconnects.

© 2013 Optical Society of America

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