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Realize the Concentric Circles Pattern based on Two-Surface-Plasmon-Polariton Absorption Photolithography

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Abstract

Based on a photolithography method with two-surface-plasmon-polariton-absorption effect, a concentric-circle pattern with linewidth of ~70nm is realized under the exposure of 400nm femtosecond laser. The pattern is promising of realizing optical devices of light field gathering or bio-sensing.

© 2014 Optical Society of America

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