Abstract
We demonstrate an erasable grating coupler which allows optical device testing throughout the fabrication process without impairing final circuit performance. Refractive index variation is introduced using ion implantation and can be subsequently removed using laser annealing.
© 2014 Optical Society of America
PDF ArticleMore Like This
V. Dolores-Calzadilla, A. Higuera-Rodriguez, D. Heiss, and M. Smit
IT2A.1 Integrated Photonics Research, Silicon and Nanophotonics (IPR) 2014
Tomoya Yoshida, Emiko Omoda, Yuki Atsumi, Takashi Nishi, Syougo Tajima, Ryohei Takei, Noboru Miura, Masahiko Mori, and Youichi Sakakibara
ITu2B.1 Integrated Photonics Research, Silicon and Nanophotonics (IPR) 2016
Huijuan Zhang, Chao Li, Xiaoguang Tu, Haifeng Zhou, Xianshu Luo, Mingbin Yu, and G. Q. Lo
Th1A.4 Optical Fiber Communication Conference (OFC) 2014