Structured-illumination microscopy and microdeflectometry acquire the shape of microscopic objects with a noise level down to 1 nanometer, a depth of field 100 times larger than the Rayleigh depth, and slope angles up to 80°.
© 2011 OSA
(110.6880) Imaging systems : Three-dimensional image acquisition
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(180.6900) Microscopy : Three-dimensional microscopy
G. Haeusler, M. Vogel, Z. Yang, A. Kessel, and C. Faber, "SIM and Deflectometry: New Tools to Acquire Beautiful, SEM-like 3D Images," in Imaging and Applied Optics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper JWC1.
References are not available for this paper.