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Conference Paper
Applied Industrial Optics: Spectroscopy, Imaging and Metrology
Toronto Canada
July 10-14, 2011
ISBN: 978-1-55752-914-5
Joint AIO/IS Session II: 3D Imaging (JWC)

SIM and Deflectometry: New Tools to Acquire Beautiful, SEM-like 3D Images

Gerd Haeusler, Markus Vogel, Zheng Yang, Alexander Kessel, and Christian Faber  »View Author Affiliations


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Structured-illumination microscopy and microdeflectometry acquire the shape of microscopic objects with a noise level down to 1 nanometer, a depth of field 100 times larger than the Rayleigh depth, and slope angles up to 80°.

© 2011 OSA

OCIS Codes
(110.6880) Imaging systems : Three-dimensional image acquisition
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(180.6900) Microscopy : Three-dimensional microscopy

G. Haeusler, M. Vogel, Z. Yang, A. Kessel, and C. Faber, "SIM and Deflectometry: New Tools to Acquire Beautiful, SEM-like 3D Images," in Imaging and Applied Optics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper JWC1.

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