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Conference Paper
Applied Industrial Optics: Spectroscopy, Imaging and Metrology
Monterey, California United States
June 24-28, 2012
ISBN: 1-55752-947-7
Joint Poster Session (JTu5A)

Quality assessment of precision optical surfaces through light scattering techniques

Sven Schröder, Alexander von Finck, Tobias Herffurth, and Angela Duparré  »View Author Affiliations


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Light scattering methods are extremely capable for the characterization of optical surfaces. This will be demonstrated for different applications ranging from anisotropic diamond-turned surfaces to polished surfaces exhibiting defects.

© 2012 OSA

OCIS Codes
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(220.1920) Optical design and fabrication : Diamond machining

S. Schröder, A. von Finck, T. Herffurth, and A. Duparré, "Quality assessment of precision optical surfaces through light scattering techniques," in Imaging and Applied Optics Technical Papers, OSA Technical Digest (online) (Optical Society of America, 2012), paper JTu5A.10.

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