Light scattering methods are extremely capable for the characterization of optical surfaces. This will be demonstrated for different applications ranging from anisotropic diamond-turned surfaces to polished surfaces exhibiting defects.
© 2012 OSA
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(220.1920) Optical design and fabrication : Diamond machining
S. Schröder, A. von Finck, T. Herffurth, and A. Duparré, "Quality assessment of precision optical surfaces through light scattering techniques," in Imaging and Applied Optics Technical Papers, OSA Technical Digest (online) (Optical Society of America, 2012), paper JTu5A.10.
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