Experimental imaging at λ=193 nm of sub-resolved defects performed at several focus positions yields a volume of spatial and intensity data. Defects are located in a differential volume, given a reference, with up to 5x increase in sensitivity.
© 2013 OSA
B. Barnes, M. Y. Sohn, F. Goasmat, H. Zhou, R. M. Silver, and A. Arceo, "Harnessing 3D Scattered Optical Fields for sub-20 nm Defect Detection," in Imaging and Applied Optics, OSA Technical Digest (online) (Optical Society of America, 2013), paper ATu2B.2.
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