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Conference Paper
Applied Industrial Optics: Spectroscopy, Imaging and Metrology
Arlington, Virginia United States
June 23-27, 2013
ISBN: 978-1-55752-975-6
SMALL: Can We Make it and Can We Find It (ATu2B)

Harnessing 3D Scattered Optical Fields for sub-20 nm Defect Detection

Bryan Barnes, Martin Y. Sohn, Francois Goasmat, Hui Zhou, Richard M. Silver, and Abraham Arceo  »View Author Affiliations


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Experimental imaging at λ=193 nm of sub-resolved defects performed at several focus positions yields a volume of spatial and intensity data. Defects are located in a differential volume, given a reference, with up to 5x increase in sensitivity.

© 2013 OSA

OCIS Codes
(100.6890) Image processing : Three-dimensional image processing
(150.3040) Machine vision : Industrial inspection

B. Barnes, M. Y. Sohn, F. Goasmat, H. Zhou, R. M. Silver, and A. Arceo, "Harnessing 3D Scattered Optical Fields for sub-20 nm Defect Detection," in Imaging and Applied Optics, OSA Technical Digest (online) (Optical Society of America, 2013), paper ATu2B.2.

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