Optical metrology has shown to be a versatile tool for the solution of many inspection problems. In this contribution current challenges to optical metrology are discussed and new technical improvements that help to overcome existing restrictions are examined. On example of selected applications the progress in bringing optical metrology to the real world is shown.
© 2013 OSA
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
W. Osten, "Optical Metrolog: From the Laboratory to the Real World," in Imaging and Applied Optics, OSA Technical Digest (online) (Optical Society of America, 2013), paper JW2B.4.
References are not available for this paper.