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Conference Paper
Applied Industrial Optics: Spectroscopy, Imaging and Metrology
Arlington, Virginia United States
June 23-27, 2013
ISBN: 978-1-55752-975-6
Applied Computational Optics (AIO/COSI) (JW2B)

Optical Metrolog: From the Laboratory to the Real World

Wolfgang Osten  »View Author Affiliations


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Optical metrology has shown to be a versatile tool for the solution of many inspection problems. In this contribution current challenges to optical metrology are discussed and new technical improvements that help to overcome existing restrictions are examined. On example of selected applications the progress in bringing optical metrology to the real world is shown.

© 2013 OSA

OCIS Codes
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4630) Instrumentation, measurement, and metrology : Optical inspection

W. Osten, "Optical Metrolog: From the Laboratory to the Real World," in Imaging and Applied Optics, OSA Technical Digest (online) (Optical Society of America, 2013), paper JW2B.4.

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