Performance characteristics of a MEMS deformable mirror are modeled and measured. Open loop control of the mirror is achieved using an elastic model. Air damping effects on device dynamics are analyzed and measured. Article not available.
© 2007 OSA
(010.0010) Atmospheric and oceanic optics : Atmospheric and oceanic optics
(010.1080) Atmospheric and oceanic optics : Active or adaptive optics
(230.0230) Optical devices : Optical devices
(230.4040) Optical devices : Mirrors
T. Bifano, " MEMS Wavefront Correctors: Electromechanical Theory and Recent Performance Advances," in Adaptive Optics: Analysis and Methods/Computational Optical Sensing and Imaging/Information Photonics/Signal Recovery and Synthesis Topical Meetings on CD-ROM, OSA Technical Digest (CD) (Optical Society of America, 2007), paper ATuD1.
References are not available for this paper.