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Conference Paper
Adaptive Optics: Methods, Analysis and Applications
Vancouver Canada
June 18, 2007
ISBN: 1-55752-838-1
Deformable Mirrors (ATuD)

MEMS Wavefront Correctors: Electromechanical Theory and Recent Performance Advances

Thomas Bifano

http://dx.doi.org/10.1364/AOPT.2007.ATuD1


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Abstract

Performance characteristics of a MEMS deformable mirror are modeled and measured. Open loop control of the mirror is achieved using an elastic model. Air damping effects on device dynamics are analyzed and measured. Article not available.

© 2007 OSA

OCIS Codes
(010.0010) Atmospheric and oceanic optics : Atmospheric and oceanic optics
(010.1080) Atmospheric and oceanic optics : Active or adaptive optics
(230.0230) Optical devices : Optical devices
(230.4040) Optical devices : Mirrors

Citation
T. Bifano, " MEMS Wavefront Correctors: Electromechanical Theory and Recent Performance Advances," in Adaptive Optics: Analysis and Methods/Computational Optical Sensing and Imaging/Information Photonics/Signal Recovery and Synthesis Topical Meetings on CD-ROM, OSA Technical Digest (CD) (Optical Society of America, 2007), paper ATuD1.
http://www.opticsinfobase.org/abstract.cfm?URI=AOPT-2007-ATuD1


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