Spectral responses of gratings in SOI are extracted using time windowing to eliminate parasitic reflections. Filtering high spatial frequencies of the phase profile, obtained by layer peeling, allows examination of the wafer thickness uniformity.
© 2012 OSA
A. D. Simard, Y. Painchaud, and S. LaRochelle, "Characterization of Integrated Bragg Grating Profiles," in Advanced Photonics Congress, OSA Technical Digest (online) (Optical Society of America, 2012), paper BM3D.7.
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