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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference
  • Technical Digest (Optica Publishing Group, 2003),
  • paper CTuD2

Large Area, High Speed InGaAs Thin Film MSMs for Heterogeneously Integrated Optoelectronics

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Abstract

Thin film InGaAs photodetectors for heterogeneously integrated optoelectronics are demonstrated with low dark current (0.16nA at 5V), and high speed (3ps rise time, 6.3ps FWHM), large area (40 µm), and good responsivity (0.19A/W at 5V).

© 2003 Optical Society of America

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