A new approach to fabricating hemispherical-cavity arrays on silicon substrates using laser-assisted nanoimprinting of self-assembled particles has been developed. Silica particles with different diameters from 160 nm to 5 μm were used for this process.
© 2004 Optical Society of America
L. P. Li., Y. F. Lu, K. K. Mendu, D. W. Doerr, and D. R. Alexander, "Laser-assisted nanoimprinting using self-assembled nanoparticles," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2004), paper CFK1.
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