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Conference Paper
Conference on Lasers and Electro-Optics
San Francisco, California United States
May 16, 2004
ISBN: 1-55752-770-9
Laser Nanoprocessing (CFK)

Laser-assisted nanoimprinting using self-assembled nanoparticles

L.P. Li., Y.F. Lu, K. K. Mendu, D.W. Doerr, and D.R. Alexander

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Abstract

A new approach to fabricating hemispherical-cavity arrays on silicon substrates using laser-assisted nanoimprinting of self-assembled particles has been developed. Silica particles with different diameters from 160 nm to 5 μm were used for this process.

© 2004 Optical Society of America

OCIS Codes
(140.0140) Lasers and laser optics : Lasers and laser optics
(140.2180) Lasers and laser optics : Excimer lasers
(140.3390) Lasers and laser optics : Laser materials processing

Citation
L. P. Li., Y. F. Lu, K. K. Mendu, D. W. Doerr, and D. R. Alexander, "Laser-assisted nanoimprinting using self-assembled nanoparticles," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2004), paper CFK1.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2004-CFK1


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