We have ablated holes in pre-thinned Si foils using an ultrafast laser. High resolution imaging of the edges of these holes reveal collateral damage limited to within 10 nanometers.
© 2004 Optical Society of America
(240.0240) Optics at surfaces : Optics at surfaces
(240.0310) Optics at surfaces : Thin films
(350.0350) Other areas of optics : Other areas of optics
(350.1820) Other areas of optics : Damage
Y. N. Picard, S. M. Yalisove, H. Liu, and G. Mourou, "Confining collateral damage to less than 10 nm during femtosecond laser machining," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2004), paper CMY2.
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