Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > CLEO > 2004 > CMY > CMY2
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper CMY2

Confining collateral damage to less than 10nm during femtosecond laser machining

Yoosuf N. Picard, Steven M. Yalisove, Hsiao-hua Liu, and Gerard Mourou

Not Accessible

Your library or personal account may give you access

Abstract

We have ablated holes in pre-thinned Si foils using an ultrafast laser. High resolution imaging of the edges of these holes reveal collateral damage limited to within 10 nanometers.

© 2004 Optical Society of America

PDF Article
More Like This
Investigation of water spray to reduce collateral thermal damage during laser resection of soft tissue

D. Theisen-Kunde, H. Wolken, D. Ellebrecht, V. Danicke, L. Wurster, M. Kleemann, and R. Birngruber
88030F European Conference on Biomedical Optics (ECBO) 2013

Excimer Laser Debridement of Necrotic Erosions of Skin without Collateral Damage

James J. Wynne, Jerome M. Felsenstein, Robert Trzcinski, Donna Zupanski-Nielsen, and Daniel P. Connors
809213 European Conference on Biomedical Optics (ECBO) 2011

Ultrahigh precision machining using femtosecond laser sources

Andreas Ostendorf
PTuB1 Photonic Applications Systems Technologies Conference (CLEO:A&T) 2004

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use