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Conference Paper
Conference on Lasers and Electro-Optics
San Francisco, California United States
May 16, 2004
ISBN: 1-55752-770-9
Material Modification with Femtosecond Pulses (CMY)

The role of the native oxide on silicon in femtosecond laser damage studies at grazing incidence

Yoosuf N. Picard, Joel P. McDonald, and Steven M. Yalisove

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Abstract

Femtosecond laser ablation studies of silicon with and without the native oxide on the surface were conducted in an ultrahigh vacuum environment. SEM results show a clear difference in the laser intensity threshold for ablation.

© 2004 Optical Society of America

OCIS Codes
(240.0240) Optics at surfaces : Optics at surfaces
(240.6700) Optics at surfaces : Surfaces
(350.0350) Other areas of optics : Other areas of optics
(350.1820) Other areas of optics : Damage

Citation
Y. N. Picard, J. P. McDonald, and S. M. Yalisove, "The role of the native oxide on silicon in femtosecond laser damage studies at grazing incidence," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2004), paper CMY5.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2004-CMY5


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