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Conference Paper
Conference on Lasers and Electro-Optics
San Francisco, California United States
May 16, 2004
ISBN: 1-55752-770-9
Unconventional Structured Materials (CThAA)

Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon with KOH

Z. Moktadir, G. V. Prakash, E. Koukharenko, C. Gollasch, D. M. Bagnall, M. Kraft, E. A. Hinds, and J. J. Baumberg

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Abstract

We report in this work the fabrication and optical characterization of micromirrors with inversed pyramidal shape (pits). The pyramids are etched on silicon using an anisotropic etchant and then gold coated to form a mirror.

© 2004 Optical Society of America

OCIS Codes
(160.0160) Materials : Materials
(160.3900) Materials : Metals
(230.0230) Optical devices : Optical devices
(230.4040) Optical devices : Mirrors

Citation
Z. Moktadir, G. V. Prakash, E. Koukharenko, C. Gollasch, D. M. Bagnall, M. Kraft, E. A. Hinds, and J. J. Baumberg, "Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon with KOH," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2004), paper CThAA4.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2004-CThAA4


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