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Conference Paper
Conference on Lasers and Electro-Optics
San Francisco, California United States
May 16, 2004
ISBN: 1-55752-770-9
Unconventional Structured Materials (CThAA)

Growth of diamond-like films at room temperature on Si and III-V materials

Renato Bugge and Bjørn-Ove Fimland

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Abstract

A new method to grow diamond-like films was used on Si and in III-V optoelectronic components. Room temperature deposition of amorphous-like films with refractive index of 2.24 was done on and around AlGaAsSb waveguides.

© 2004 Optical Society of America

OCIS Codes
(160.0160) Materials : Materials
(160.3130) Materials : Integrated optics materials
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication

Citation
R. Bugge and B. Fimland, "Growth of diamond-like films at room temperature on Si and III-V materials," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2004), paper CThAA7.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2004-CThAA7

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