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Conference Paper
Conference on Lasers and Electro-Optics
San Francisco, California United States
May 16, 2004
ISBN: 1-55752-770-9
Ultrafast Laser Processing (CThD)

Direct TEM observation of amorphous Si created by femtosecond laser irradiation

Ming Li, Jimmy Y. Jia, and Carl V. Thompson

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Abstract

Amorphization of silicon was confirmed which TEM after femtosecond laser irradiation. Since amorphous silicon is formed from undercooled liquid silicon, there is melting of the substrate even in the femtosecond regime.

© 2004 Optical Society of America

OCIS Codes
(160.0160) Materials : Materials
(160.4670) Materials : Optical materials
(160.6000) Materials : Semiconductor materials

Citation
M. Li, J. Y. Jia, and C. V. Thompson, "Direct TEM observation of amorphous Si created by femtosecond laser irradiation," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2004), paper CThD2.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2004-CThD2


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