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Conference Paper
Conference on Lasers and Electro-Optics
San Francisco, California United States
May 16, 2004
ISBN: 1-55752-770-9
Laser Sensing (CThN)

Development of laser-terahertz emission microscope for inspecting the electrical faults in semiconductor devices

Masatsugu Yamashita, Toshihiko Kiwa, Masayoshi Tonouchi, and Kodo Kawase

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Abstract

We have developed a laser-terahertz emission microscope for inspecting the electrical faults in integrated circuits. By improving the spatial resolution of the system, we successfully observed the THz emission image in a microprocessor on standby.

© 2004 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(180.0180) Microscopy : Microscopy
(180.5810) Microscopy : Scanning microscopy

Citation
M. Yamashita, T. Kiwa, M. Tonouchi, and K. Kawase, "Development of laser-terahertz emission microscope for inspecting the electrical faults in semiconductor devices," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2004), paper CThN5.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2004-CThN5


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