OSA's Digital Library

Optics InfoBase > Conference Papers > CLEO > 2004 > CThP > Page CThP7 © 2004 OSA

Conference Paper
Conference on Lasers and Electro-Optics
San Francisco, California United States
May 16, 2004
ISBN: 1-55752-770-9
Nanostructured Materials and Glasses (CThP)

As-grown low-loss germanosilicate layers by PECVD

Feridun Ay, Atilla Aydinli, and Sedat Agan

View Full Text Article

Acrobat PDF (55 KB) Note that full-text PDFs from conferences typically contain 1-3 pages of content, some or all of which might be an abstract, summary, or miscellaneous items.

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

  • Export Citation/Save Click for help


Systematic characterization of low-loss PECVD grown germanosilicate layers is reported. Addition of germane, decreased N-H bond concentration drastically leading to the lowest reported propagation loss values in germanosilicate planar waveguides, eliminating high temperature annealing requirement.

© 2004 Optical Society of America

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(130.3130) Integrated optics : Integrated optics materials
(310.0310) Thin films : Thin films
(310.3840) Thin films : Materials and process characterization

F. Ay, A. Aydinli, and S. Agan, "As-grown low-loss germanosilicate layers by PECVD," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2004), paper CThP7.

Sort:  Journal  |  Reset


References are not available for this paper.

OSA is a member of CrossRef.

CrossCheck Deposited