Systematic characterization of low-loss PECVD grown germanosilicate layers is reported. Addition of germane, decreased N-H bond concentration drastically leading to the lowest reported propagation loss values in germanosilicate planar waveguides, eliminating high temperature annealing requirement.
© 2004 Optical Society of America
(130.0130) Integrated optics : Integrated optics
(130.3130) Integrated optics : Integrated optics materials
(310.0310) Thin films : Thin films
(310.3840) Thin films : Materials and process characterization
F. Ay, A. Aydinli, and S. Agan, "As-grown low-loss germanosilicate layers by PECVD," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2004), paper CThP7.
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