Abstract

A digital micromirror device (DMD) is a microelectromechanical structure (MEMS) device with many micromirrors on the top surface; it is used as a spatial light modulator for many applications, including lithography, projection, telecommunications, and lasers. We determined the limiting resolution of a DMD by measuring the modulation transfer function (MTF) of a DMD and intersecting with the aerial image modulation (AIM) at 351-nm wavelength. The limiting resolution was 14.61 cycles/mm. We generated the laser-beam profile by changing the pattern of micromirrors in the DMD. The input beam from center peaked profile transformed into a flattop super-Gaussian profile with order 6.

© 2004 Optical Society of America