A novel interferometric ellipsometer with no moving parts which uses a semiconductor laser diode as the source is described. Temporal fringes are produced by modulation of the bias current and unbalanced arms of the interferometer.
© 2004 Optical Society of America
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3180) Instrumentation, measurement, and metrology : Interferometry
L. R. Watkins, "Novel interferometric ellipsometer with wavelength-swept source," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2004), paper CTuGG3.
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