We have demonstrated the fabrication of uniform arrays of quantum dots by metal organic chemical vapor deposition using electron beam lithography and selective area epitaxy techniques. Photoluminescence data showing emission at 1250nm is presented.
© 2004 Optical Society of America
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.0230) Optical devices : Optical devices
(230.6080) Optical devices : Sources
V. C. Elarde, R. B. Swint, T. S. Yeoh, and J. J. Coleman, "Fabrication of InGaAs quantum dots by metal organic chemical vapor deposition and selective area epitaxy," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2004), paper CTuM3.