We demonstrate a side-diffraction interferometric method for characterization of transmission diffraction gratings enabling simultaneous measurement of the local chirp and substrate thickness variation.
© 2004 Optical Society of America
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(230.0230) Optical devices : Optical devices
(230.1950) Optical devices : Diffraction gratings
M. Sumetsky, T. P. White, H. M. Dyson, P. S. Westbrook, and B. J. Eggleton, "Interferometric characterization of transmission diffraction gratings with non-flat substrate surfaces," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2004), paper CTuX6.
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