We demonstrate the generation of fully spatially coherent EUV light at 13nm for the first time using high harmonic upconversion. This is a significant improvement over past work.
© 2004 Optical Society of America
X. Zhang, A. R. Libertun, A. Paul, E. Gagnon, S. Backus, H. Kapteyn, M. Murnane, R. Bartels, Y. Liu, and D. Attwood, "Fully coherent light at 13 nm using quasi phase matching in gas-filled modulated waveguides," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2004), paper JMC4.
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