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Conference Paper
Conference on Lasers and Electro-Optics
San Francisco, California United States
May 16, 2004
ISBN: 1-55752-770-9
Coherent XUV Generation and Applications (JMD)

High-resolution EUV imaging using high harmonic generation

Ariel R. Libertun, Xiaoshi Zhang, Ariel Paul, Daisy Raymondson, Erez Gershgoren, Etienne Gagnon, Sterling Backus, Margaret M. Murnane, Henry C. Kapteyn, Randy A. Bartels, Yanwei Liu, and David T. Attwood

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We use a simple set-up consisting of two multilayer mirrors and a hollow fiber EUV light source to obtain high-resolution EUV images. Magnifications of X20 and X50 are demonstrated.

© 2004 Optical Society of America

OCIS Codes
(180.0180) Microscopy : Microscopy
(180.7460) Microscopy : X-ray microscopy
(340.0340) X-ray optics : X-ray optics
(340.7440) X-ray optics : X-ray imaging

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, "High-resolution EUV imaging using high harmonic generation," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2004), paper JMD4.

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