We use a simple set-up consisting of two multilayer mirrors and a hollow fiber EUV light source to obtain high-resolution EUV images. Magnifications of X20 and X50 are demonstrated.
© 2004 Optical Society of America
A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, "High-resolution EUV imaging using high harmonic generation," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2004), paper JMD4.
References are not available for this paper.