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Conferences > CLEO > 2005 > CFH > CFH6
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2005),
  • paper CFH6

Fiber Laser Driven EUV Generation

Yu-Chung Chang, Aghapi Mordovanakis, Kai-Chung Hou, John Nees, Bixue Hou, Anatoly Maksimchuk, Gerard Mourou, and Almantas Galvanauskas

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Abstract

Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.

© 2005 Optical Society of America

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