We demonstrate 13 mm-long quasi-phase-matched difference-frequency generation device with adhered ridge waveguides fabricated by ECR-RIE dry etching method in periodically poled Zn:LN. The obtained SHG normalized conversion efficiency was 260%/Wcm2 in the telecommunication band.
© 2005 Optical Society of America
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.0230) Optical devices : Optical devices
(230.7380) Optical devices : Waveguides, channeled
Y. Kato, Y. Usui, H. Nakajima, S. Kurimura, M. Motoya, F. Yamamoto, and J. Ichikawa, "Quasi-phase matched difference-frequency generator with adhered ridge waveguide fabricated by dry etching method," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2005), paper CML6.
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