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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2005),
  • paper CThCC2

3-D Fabrication of Microfluidic Channels in Fused Silica Using Focused Femtosecond Laser Beams and Selective Chemical Etching

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Abstract

We demonstrate polarization dependence of the etch rate in femtosecond laser fabrication of 3-D microfluidic channels. We also show the existence of an energy threshold at which etching becomes highly selective.

© 2005 Optical Society of America

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