We demonstrate polarization dependence of the etch rate in femtosecond laser fabrication of 3-D microfluidic channels. We also show the existence of an energy threshold at which etching becomes highly selective.
© 2005 Optical Society of America
(140.0140) Lasers and laser optics : Lasers and laser optics
(140.3440) Lasers and laser optics : Laser-induced breakdown
(320.0320) Ultrafast optics : Ultrafast optics
(320.7110) Ultrafast optics : Ultrafast nonlinear optics
C. Hnatovsky, R. S. Taylor, R. Bhardwaj, E. Simova, D. M. Rayner, and P. B. Corkum, "3-D Fabrication of Microfluidic Channels in Fused Silica Using Focused Femtosecond Laser Beams and Selective Chemical Etching," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2005), paper CThCC2.
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