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Conference Paper
Conference on Lasers and Electro-Optics
Baltimore, Maryland United States
May 22, 2005
ISBN: 1-55752-770-9
Femtosecond Micromaching II (CThCC)

Fabrication of Waveguide-Based Vibration Sensors by Femtosecond Laser Micromachining

Masanao Kamata, Minoru Obara, Rafael R. Gattass, Loren R. Cerami, and Eric Mazur

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We report the fabrication of vibration sensors using femtosecond lasers for the first time to our knowledge. These sensors show linear frequency response to input vibrations and an acceleration sensitivity below 0.01 m/s2.

© 2005 Optical Society of America

OCIS Codes
(230.0230) Optical devices : Optical devices
(230.1150) Optical devices : All-optical devices
(320.0320) Ultrafast optics : Ultrafast optics
(320.7110) Ultrafast optics : Ultrafast nonlinear optics

M. Kamata, M. Obara, R. R. Gattass, L. R. Cerami, and E. Mazur, "Fabrication of Waveguide-Based Vibration Sensors by Femtosecond Laser Micromachining," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2005), paper CThCC3.

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