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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2005),
  • paper CThL6

Ambient atmosphere effect on dry laser cleaning efficiencies for sub-micron particles on critical surfaces

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Abstract

The effects of viscous air drag and Brownian particle motion on dry laser cleaning efficiencies are discussed for 10−2-1 µm spherical particle contaminants on critical surfaces.

© 2005 Optical Society of America

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