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Conference Paper
Conference on Lasers and Electro-Optics
Baltimore, Maryland United States
May 22, 2005
ISBN: 1-55752-770-9
Optical Instrumentation (CThT)

Reliable Super Resolution Beam Profiler for Lasers in Manufacturing

Farzan N. Ghauri and Nabeel A. Riza

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Abstract

Demonstrated is a first of a kind hybrid analog-digital laser beam profiler based on a Digital Micro-Mirror Device. Tests at 1550 nm show a 2 micron profiling resolution over a 600 micron side square zone.

© 2005 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(230.0230) Optical devices : Optical devices
(230.3990) Optical devices : Micro-optical devices

Citation
F. N. Ghauri and N. A. Riza, "Reliable Super Resolution Beam Profiler for Lasers in Manufacturing," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2005), paper CThT6.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2005-CThT6


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