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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2005),
  • paper CTuB4

Second-Harmonic Characterization of Si/Hf(1−x)SixO2 Interfaces

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Abstract

We present a Second-Harmonic Generation study of a set of device quality Si/Hf(1−x)SixO2 interfaces for different x values and annealing treatments. Rotationally-anisotropic, spectroscopic and time-dependent SHG depend strongly on dielectric composition and annealing.

© 2005 Optical Society of America

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