We report high resolution solid-immersion sub-surface imaging of a flip-chip by detecting the two-photon photocurrent generated by a 1530nm femtosecond Er:fiber laser. Features show high contrast and a resolution of 325nm.
© 2005 Optical Society of America
E. Ramsay, N. Pleynet, D. Xiao, R. J. Warburton, and D. T. Reid, "Solid-Immersion Imaging of a Silicon Flip-Chip with a Resolution of 325nm Using the Optical-Beam Induced Current Method," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2005), paper CTuB6.
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