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Conference Paper
Conference on Lasers and Electro-Optics
Baltimore, Maryland United States
May 22, 2005
ISBN: 1-55752-770-9
New Applications of Nonlinear Optics (CTuB)

Solid-Immersion Imaging of a Silicon Flip-Chip with a Resolution of 325nm Using the Optical-Beam Induced Current Method

Euan Ramsay, Nicholas Pleynet, Dong Xiao, Richard J. Warburton, and Derryck T. Reid

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Abstract

We report high resolution solid-immersion sub-surface imaging of a flip-chip by detecting the two-photon photocurrent generated by a 1530nm femtosecond Er:fiber laser. Features show high contrast and a resolution of 325nm.

© 2005 Optical Society of America

OCIS Codes
(110.0110) Imaging systems : Imaging systems
(110.0180) Imaging systems : Microscopy
(190.0190) Nonlinear optics : Nonlinear optics
(190.4180) Nonlinear optics : Multiphoton processes

Citation
E. Ramsay, N. Pleynet, D. Xiao, R. J. Warburton, and D. T. Reid, "Solid-Immersion Imaging of a Silicon Flip-Chip with a Resolution of 325nm Using the Optical-Beam Induced Current Method," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2005), paper CTuB6.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2005-CTuB6


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