Low-power indium phosphide microelectromechanical systems (MEMS) cantilever resonators with integrated optical waveguides for bio-chemical sensing are presented. Resonant frequencies up to 168.8kHz (Q=26.5) have been measured in air and mass detection of 510fg/100Hz is possible.
© 2005 Optical Society of America
(130.0130) Integrated optics : Integrated optics
(130.3120) Integrated optics : Integrated optics devices
(280.0280) Remote sensing and sensors : Remote sensing and sensors
(280.1100) Remote sensing and sensors : Aerosol detection
M. W. Pruessner, W. Chuang, K. Amarnath, S. Kanakaraju, and R. Ghodssi, "Micromechanical Resonators with Integrated Optical Waveguides for Sensing Applications," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2005), paper CTuH5.
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