In this report, by introducing a specially designed prism, we demonstrate the fabrication of 3-dimensional photonic crystals in polymeric photo-resist by laser holography lithography through a single beam.
© 2005 Optical Society of America
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.3740) Optical design and fabrication : Lithography
(220.4000) Optical design and fabrication : Microstructure fabrication
L. Wu, Y. Zhong, C. T. Chan, K. S. Wong, and G. Wang, "Fabrication of Three-Dimensional Polymer Photonic Crystal by a Single Beam Laser Holographic Lithography," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2005), paper CTuU2.