Micromechanical resonators incorporating waveguide Fabry-Perot cavities are designed and losses affecting optical finesse are studied. A doubling of the effective Q-factor in a coupled-optical-mechanical resonator is obtained, enabling high-resolution resonant sensors with optical readout.
© 2006 Optical Society of America
M. W. Pruessner, T. H. Stievater, and W. S. Rabinovich, "Micromechanical Resonators with Integrated Waveguides and Fabry-Perot Cavities," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2006), paper CFC6.
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