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Conference Paper
Conference on Lasers and Electro-Optics
Long Beach, California United States
May 21, 2006
ISBN: 1-55752-813-6
Instrumentation and Diagnostics (CME)

Improved Microelectronics Manufacturing Using New Laser Technologies

Edward Swenson

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Abstract

The use of the 1.3 line and third harmonic of the Diode Pumped Nd:YAG laser provides a variety of new methods to address the continued advance towards smaller, lighter more complex microelectronics.

© 2006 Optical Society of America

OCIS Codes
(000.2700) General : General science

Citation
E. Swenson, "Improved Microelectronics Manufacturing Using New Laser Technologies," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2006), paper CME1.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2006-CME1


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