The use of the 1.3 line and third harmonic of the Diode Pumped Nd:YAG laser provides a variety of new methods to address the continued advance towards smaller, lighter more complex microelectronics.
© 2006 Optical Society of America
(000.2700) General : General science
E. Swenson, "Improved Microelectronics Manufacturing Using New Laser Technologies," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2006), paper CME1.
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