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Conferences > CLEO > 2006 > CME > CME1
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2006),
  • paper CME1

Improved Microelectronics Manufacturing Using New Laser Technologies

Edward J. Swenson

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Abstract

The use of the 1.3 line and third harmonic of the Diode Pumped Nd:YAG laser provides a variety of new methods to address the continued advance towards smaller, lighter more complex microelectronics.

© 2006 Optical Society of America

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