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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2006),
  • paper CME4

Sub-38 nm resolution microscopy with a tabletop 13 nm wavelength laser

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Abstract

Sub-38 nm spatial resolution imaging was achieved with a tabletop microscope based on zone-plate optics and a high repetition rate tabletop 13 nm wavelength laser.

© 2006 Optical Society of America

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