Femtosecond laser micromachined multi-orifice two-dimensional silicon-nitride membrane arrays are reported to generate picoliter droplets. These devices use higher-order resonance ejection mechanisms, increase the flow-rate per membrane and can eject from various locations on a membrane.
© 2006 Optical Society of America
(230.0230) Optical devices : Optical devices
(230.4000) Optical devices : Microstructure fabrication
(350.0350) Other areas of optics : Other areas of optics
(350.3390) Other areas of optics : Laser materials processing
U. Demirici and A. Ozcan, "Femtosecond Laser Micromachined Multiple-Orifice Two-Dimensional Ejector Arrays for Picoliter Droplet Ejection," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2006), paper CMHH2.
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