The feasibility of using femtosecond laser micro-machining to create Gallium Arsenide (GaAs) quasi-phasematched devices from single GaAs wafers is investigated. We describe machining of the structure and details of the machining quality achievable in GaAs.
© 2006 Optical Society of America
S. Campbell, E. Ramsay, D. P. Hand, and D. T. Reid, "Towards the Creation of Quasi-Phasematched Devices Using Femtosecond Laser Micromachining," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2006), paper CML6.
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