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Conferences > CLEO > 2006 > CThD > CThD4
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2006),
  • paper CThD4

Optical characterization of a leaky-mode polysilicon photodetector using near-field scaning optical microscopy

G. Yuan, P. Nikkel, C. Thangaraj, T. W. Chen, R. Pownall, A. Iguchi, and K. L. Lear

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Abstract

Near-field scanning optical microscopy was used to characterize the light absorption capability of a leaky-mode coupled polysilicon photodetector fabricated for CMOS on-chip optical interconnects. The observed results are in good agreement with modal calculations.

© 2006 Optical Society of America

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