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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest Series (CD) (Optica Publishing Group, 2007),
  • paper CFM6

Nanometric three-dimensional sub-surface imaging of a silicon flip-chip

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Abstract

By implementing two-photon optical-beam-induced-current microscopy using a solidimmersion lens, imaging inside a silicon flip chip is reported with 166nm lateral resolution and an axial resolution capable of resolving features only 100nm deep.

© 2007 Optical Society of America

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